Reliability of MEMS : testing of materials and devices /

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Corporate Author: ebrary, Inc.
Other Authors: Tabata, Osamu., Tsuchiya, Toshiyuki.
Format: EBOOK
Language:English
Published: Weinheim : Wiley-VCH, 2013.
Series:Advanced micro & nanosystems.
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Online Access:Go to eBook
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Call Number: Online TK7875 .R45 2013
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